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PLASMA SOURCE AND METHOD FOR PREPARING AND COATING SURFACES USING ATMOSPHERIC PLASMA PRESSURE WAVES
PLASMA SOURCE AND METHOD FOR PREPARING AND COATING SURFACES USING ATMOSPHERIC PLASMA PRESSURE WAVES
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机译:等离子体源和使用大气等离子体压力波制备和涂覆表面的方法
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摘要
A method for cleaning a surface of a substrate with an atmospheric pressure plasma process in which a plasma is generated at atmospheric pressure. The plasma has an energetic species reactive with one or more components of an undesirable material on the substrate. In this method, the plasma flows from a nozzle exit as a plasma plume exiting into an ambient environment, and the surface of the substrate is exposed to the energetic species in the plasma plume, thereby producing an activated surface capable of adhering on contact a coating material to the activated surface.
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