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Method for providing deionized water with dynamic electrical resistivity

机译:具有动态电阻率的去离子水的方法

摘要

A method includes mixing a first deionized water (DI) water from a first pipe and a second DI water from a second pipe in a merging pipe that is in fluid communication with the first pipe and the second pipe. An electrical resistivity of the first DI water is different from an electrical resistivity of the second DI water. A mixture of the first DI water and the second DI water is applied from the merging pipe onto a wafer.
机译:一种方法包括将第一去离子水(DI)水与第一管的第一去离子水(DI)水混合在与第一管和第二管道流体连通的合并管中的第二管中。 第一二水的电阻率不同于第二二聚体的电阻率。 将第一二水和第二二水的混合物从合并管施加到晶片上。

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