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METHOD FOR PROVIDING DEIONIZED WATER WITH DYNAMIC ELECTRICAL RESISTIVITY
METHOD FOR PROVIDING DEIONIZED WATER WITH DYNAMIC ELECTRICAL RESISTIVITY
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机译:提供具有动态电阻率的去离子水的方法
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摘要
A method includes mixing a first deionized water (DI) water from a first pipe and a second DI water from a second pipe in a merging pipe that is in fluid communication with the first pipe and the second pipe. An electrical resistivity of the first DI water is different from an electrical resistivity of the second DI water. A mixture of the first DI water and the second DI water is applied from the merging pipe onto a wafer.
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