Anomaly detection device for inspection objects and abnormality detection method for inspection objects

摘要

PROBLEM TO BE SOLVED: To provide a technique capable of making an abnormal MD value larger than a normal MD value. As shown in FIG. (C), in the sample line L4, although all the waveforms A are present on the sample line L4, the sample line L4 is not shaded. That is, when the waveform A does not intersect the sample line L4 and the change amount becomes zero, the abundance amount is set to zero. [Selection diagram] Fig. 5