In the stage, an insulating film comprising a substrate having a first surface and a second surface adjacent to the first surface, and a plurality of particles having a flat surface, wherein a part of the flat surface is provided along the first surface and the second surface. Including, wherein the substrate includes a third surface 180 degrees opposite to the first surface, the insulating film is provided with a part of the flat surface along the third surface, the surface extending the first surface and the second surface The extended surface is provided to intersect at 90 degrees. The substrate may include a third surface 180 degrees opposite to the first surface, and a portion of the flat surface of the insulating layer may be provided along the third surface.
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