THERMAL PATTERN SENSOR WITH MECHANICAL REINFORCEMENT DIELECTRIC PORTIONS

摘要

Thermal pattern sensor (100) comprising: - a matrix of pixels disposed on one face (105) of a substrate (104), each pixel comprising a pyroelectric capacitor formed by a portion of pyroelectric material disposed between a lower electrode (108) and an upper electrode (110), the lower electrode being arranged between the substrate and the portion of pyroelectric material, - a protective layer (114) comprising a dielectric material and covering the pixels, and such that, in each pixel, l 'upper electrode is disposed between the protective layer and the portion of pyroelectric material, - dielectric portions (112) disposed between the pixels, extending between the face of the substrate and the protective layer and which comprise a dielectric material whose hardness is higher than that of pyroelectric material. Figure for the abstract: Figure 1.