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THERMAL PATTERN SENSOR WITH MECHANICAL REINFORCEMENT DIELECTRIC PORTIONS

机译:具有机械加强电介质部分的热图案传感器

摘要

Thermal pattern sensor (100) comprising: - a matrix of pixels disposed on one face (105) of a substrate (104), each pixel comprising a pyroelectric capacitor formed by a portion of pyroelectric material disposed between a lower electrode (108) and an upper electrode (110), the lower electrode being arranged between the substrate and the portion of pyroelectric material, - a protective layer (114) comprising a dielectric material and covering the pixels, and such that, in each pixel, l 'upper electrode is disposed between the protective layer and the portion of pyroelectric material, - dielectric portions (112) disposed between the pixels, extending between the face of the substrate and the protective layer and which comprise a dielectric material whose hardness is higher than that of pyroelectric material. Figure for the abstract: Figure 1.
机译:热图案传感器(100)包括: - 设置在基板(104)的一个面(105)上的像素矩阵,每个像素包括由设置在下电极(108)和AN之间的热电材料的一部分形成的热电电容器。上电极(110),下电极布置在基板和热电材料的一部分之间 - 保护层(114),包括介电材料并覆盖像素,使得在每个像素中,L'上电极是设置在保护层和热电材料的部分之间, - 设置在像素之间的介电部分(112),在基板的面和保护层之间延伸,并且包括其硬度高于热电材料的介电材料。摘要的图:图1。

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