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ROCKER ARM TYPE POLISHING DEVICE AND METHOD FOR PLANE PART FULL-CALIBER DETERMINISTIC POLISHING
ROCKER ARM TYPE POLISHING DEVICE AND METHOD FOR PLANE PART FULL-CALIBER DETERMINISTIC POLISHING
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机译:摇臂型抛光装置和平面全口径确定性抛光的方法
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摘要
A rocker arm type polishing device and method for plane part full-caliber deterministic polishing. The rocker arm type polishing device for plane part full-caliber deterministic polishing comprises a control system, a base (1), a lifting plate (6), a polishing module and a measuring module. The polishing module and the measuring module are both located on the base (1); the lifting plate (6) is positioned between the polishing module and the measuring module; the polishing module comprises a rocker arm mechanism (3), a polishing pad surface finishing mechanism (7), a polishing pad surface shape measuring device (2) and an annular polishing tool disc mechanism (8); and the measuring module comprises a plane part surface shape automatic measuring device (5) and a mechanical arm mechanism (4).
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