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ROCKER ARM TYPE POLISHING DEVICE AND METHOD FOR PLANE PART FULL-CALIBER DETERMINISTIC POLISHING

机译:摇臂型抛光装置和平面全口径确定性抛光的方法

摘要

A rocker arm type polishing device and method for plane part full-caliber deterministic polishing. The rocker arm type polishing device for plane part full-caliber deterministic polishing comprises a control system, a base (1), a lifting plate (6), a polishing module and a measuring module. The polishing module and the measuring module are both located on the base (1); the lifting plate (6) is positioned between the polishing module and the measuring module; the polishing module comprises a rocker arm mechanism (3), a polishing pad surface finishing mechanism (7), a polishing pad surface shape measuring device (2) and an annular polishing tool disc mechanism (8); and the measuring module comprises a plane part surface shape automatic measuring device (5) and a mechanical arm mechanism (4).
机译:摇臂式抛光装置和平面全口径确定性抛光的方法。 用于平面全口径确定性抛光的摇臂式抛光装置包括控制系统,基座(1),升降板(6),抛光模块和测量模块。 抛光模块和测量模块都位于底座上(1); 提升板(6)位于抛光模块和测量模块之间; 抛光模块包括摇臂机构(3),抛光垫表面精加工机构(7),抛光垫表面形状测量装置(2)和环形抛光工具盘机构(8); 并且测量模块包括平面部分表面形状自动测量装置(5)和机械臂机构(4)。

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