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PHOTODETECTOR, PREPARATION METHOD FOR PHOTODETECTOR, PHOTODETECTOR ARRAY, AND PHOTODETECTION TERMINAL

机译:光电探测器,光电探测器的制备方法,光电探测器阵列和光电检测终端

摘要

A photodetector, a preparation method for a photodetector, a photodetector array and a photodetection terminal. The photodetector comprises a substrate (11) and an optical resonant cavity (10) formed on the substrate (11). The optical resonant cavity (10) may comprise: a light absorption layer (13) having a light-entrance outer surface and a bottom outer surface which are opposite to each other, and an outer sidewall located between the light-entrance surface and the bottom surface; a light-strap structural layer (14) covering the light-entrance surface; and a light-reflection structural layer (12) covering the bottom outer surface and/or the outer sidewall of the light absorption layer (13), wherein the light-reflection structural layer (12) is configured to reflect external light entering the optical resonant cavity (10) by means of the light-trap structural layer (14) to increase a light propagation distance of the external light in the light absorption layer (13), thereby effectively improving the photon absorption efficiency of the photodetector.
机译:光电检测器,光电探测器的制备方法,光电探测器阵列和光电检测终端。光电探测器包括基板(11)和形成在基板(11)上的光学谐振腔(10)。光学谐振腔(10)可以包括:光吸收层(13),其具有光入口外表面和彼此相对的底部外表面,以及位于光入口表面和底部之间的外侧壁表面;覆盖光入口表面的光带结构层(14);和覆盖光吸收层(13)的底部外表面和/或外侧壁的光反射结构层(12),其中,所述光反射结构层(12)被配置为反射进入所述光学谐振的外部光腔(10)借助于光捕集结构层(14)以增加光吸收层(13)中的外部光的光传播距离,从而有效地提高光电探测器的光子吸收效率。

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