Scribe device with interpolation mechanism and interpolation mechanism for laser scribing device

摘要

Problem to be solved: to provide an interpolation mechanism for adjusting the optical attachment point in the moving direction of the conveyor by adjusting the optical path in the vertical direction of the laser beam in the conveyor system of the conveyor system.A conveyor (substrate transfer means) for horizontally transferring the substrate;A horizontal moving table moving in a direction perpendicular to the transport direction of the substrate;Provided on the horizontal moving tableLaser oscillator emitting laser beamIt is slidably installed on a horizontal moving tableReceived a laser beamVertically downward directed toward the substrateAdjust the optical path in the vertical direction.Scribe apparatus having an interpolation mechanism for adjusting the position of light attachment points.Diagram