CUBIC AL-RICH ALTIN COATINGS DEPOSITED FROM CERAMIC TARGETS

摘要

The present invention discloses a non-reactive PVD coating process for producing an aluminium-rich AlxTi1-xN-based thin film having an aluminium content of >75 at-% based on the total amount of aluminium and titanium in the thin film, a cubic crystal structure, and a columnar microstructure, wherein ceramic targets are used as a material source for the aluminium-rich AlxTi1-xN-based thin film.