A sensor device that uses the principle of laser-induced incandescence to detect particles or aerosols in a flowing fluid

摘要

A sensor device (10) for detecting particles (24) or aerosols in a flowing fluid using the laser induced incandescent principle, said sensor device (10) comprising: a first device (12) for generating laser light (14); a second device 24 for guiding the laser light 14; a third device (36) for guiding the thermal radiation (28) emitted by the particles (26) heated by the laser light (14); and a fourth device 34 for sensing thermal radiation 28 . According to the present invention, at least portions 44 , 46 of at least two of the first to fourth devices 12 , 24 , 36 , 34 are located on a common substrate 48 .