High output power quarter-wavelength shifted distributed feedback laser diode

摘要

The present invention discloses a phase shift distributed feedback laser diode. A laser diode thereof includes a substrate having a laser diode region and a phase control region, a waveguide layer on the substrate, a clad layer on the waveguide layer, a grating in the clad layer in the laser diode region, and adjacent to the laser diode region an anti-reflection film disposed on one sidewall of the substrate, the waveguide layer, and the clad layer;