Method for inspecting surface roughness of inspection object

摘要

SubjectProblem to be solved: to provide an inspection method capable of reliably detecting minute unevenness of an object to be inspected.Means to solve problemsThe light emitted from the light source 10 is applied to the wavefront modulation elementPhase by wavefront modulation elementOr amplitude modulated lightThe holographic diffractive optical element 20 is irradiated;By holographic diffractive optical element 20At a given angle for each colorThen, the light which is converted into parallel light for each color is irradiated to the object 50.The reflected light 40 from the surface 51 of the object 50 is detected by the detector 60.The portion of the surface of the object 50 to be inspected in the reflected lightThe unevenness of the surface of the object 50 to be inspected is inspected by changing the color of the surface with respect to the surface other than the unevenness.Diagram