Some embodiments include a high voltage pulsed power supply.The high voltage pulsed power supply has an amplitude of about 1 kV and a pulse width of about μ Beyond s, the pulse repetition frequency is placed in a high voltage pulser with an output that supplies pulses exceeding about 20 kHz, plasma chambers, and plasma chambers An electrode electrically coupled to the output of the high voltage pulser to generate an electric field in the plasma chamber.Diagram
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