Some embodiments include a high voltage pulsing power supply. High voltage pulsing power supply; A high voltage pulser that provides as output a pulse having an amplitude greater than about 1 kV, a pulse width greater than about 1 μs, and a pulse repetition frequency greater than about 20 kHz; Plasma chamber; And an electrode disposed within the plasma chamber, electrically coupled with the output of the high voltage pulser to create a pulsing electric field within the chamber.
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