Spindle descent information detecting mechanism and substrate processing device incorporating spindle descent information detecting mechanism

摘要

Subject By eliminating the cancel circuit and reducing the number of adjustment steps of the cancel circuit and simplifying the component configuration of the spindle descent information detecting mechanism, the substrate processing apparatus can be made compact and inexpensive, and the current flowing through the drill is easily and accurately detected, thereby facilitating the processing of the compact substrate.The spindle descent information detecting mechanism B in the substrate processing apparatus 1 isCancel circuit not requiredBy the annular current transformer 12 through which drill 5 passesWhen the drill 5 is in contact with a desired inner layer conductor layer 23, only the current flowing through the drill 5 is directly detected.The current isAs well as part of high frequency current from high frequency oscillatorSince there is a portion of the harmonic current that flows from the inverter I to the spindle body 3 through the floating capacity cm, theBecause the current flowing through drill 5 is increasedThe current detection accuracy by the current transformer is improved.The device was made small and inexpensiveEven for processing against a small substrateSurely detect the current flowing through the drillAccurately processing the substrate.Diagram