Vibration damping of MEMS accelerometer

摘要

A capacitive microelectromechanical acceleration sensor configured to measure the movement of a proof mass in the direction of the sensing axis in a capacitance measurement carried out by one or more stator measuring plates and one or more stator measuring plates. One or more first rotor damping plates and one or more first stator damping plates form a first set of parallel plates orthogonal to the first damping shaft, and the first damping axis is substantially orthogonal to the sensing axis.[Orig] Figure 2A