PHOSPHATING LIQUID RECLAMATION DEVICE, SUBSTRATE PROCESSING DEVICE, PHOSPHATING LIQUID RECLAMATION METHOD AND SUBSTRATE PROCESSING METHOD

摘要

This phosphating liquid reclamation device removes silicon from a used phosphating liquid which was used to process a substrate. The reclamation device has a recovery line, a mixing tank and a diluent supply unit. The recovery line recovers the used phosphating liquid. The mixing tank mixes the phosphating liquid recovered via the recovery line, an extracting agent for extracting silicon from the phosphating liquid, and an organic solvent for dissolving the extracting agent. The diluent supply unit supplies a diluent, which lowers the phosphate concentration of the phosphating liquid, to the phosphating liquid in the mixing tank or partway along the recovery line.