Improved detection structure for a z-axis resonance accelerometer

摘要

Detection structure (1) for a z-axis resonance accelerometer (24) comprising: - an inert mass (2) which is attached to a substrate (20) by means of elastic anchoring elements (6) in such a way that it is above the substrate (20) in the levitation is held, wherein the elastic anchoring elements (6) are arranged in such a way that they enable the inertial mass (2) to move in response to an external acceleration (az), which along a vertical axis (z) transverse to a plane ( xy) acts to execute an inertial rotational movement about a first axis of rotation (A) parallel to a horizontal axis (y) which belongs to the plane (xy) of the main extension of the inertial mass (2); and a first resonator element (10a) and a second resonator element (10b) which are mechanically coupled to the inertial mass (2) by respective elastic support elements (16), the elastic support elements (16) being set up, a rotational movement of the first resonator element (10a) to enable a second axis of rotation (B) and the second resonator element (10b) to a third axis of rotation (C), characterized in that the second axis of rotation (B) and the third axis of rotation (C) are parallel to each other and moreover parallel are aligned with the first axis of rotation (A) of the inertial mass (2), drive elements (17) being coupled to the first resonator element (10a) and the second resonator element (10b), the drive elements being set up to provide a rotational resonance drive for the resonator elements (10a, 10b) to enable the second axis of rotation (B) or the third axis of rotation (C), the drive elements (17) being electrically powered comprising those formed on the substrate (20) and disposed below and capacitively coupled to the first and second resonance elements (10a, 10b); and wherein first electrical conductor tracks (34) formed on the substrate (20) are set up to contact the drive electrodes (17), the first electrical conductor tracks (34) not being arranged below the inertial mass (2).