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METHOD FOR DETERMINING THE PATH OF A MEASUREMENT BEAM OF AN INTERFEROMETRIC MEASURING DEVICE, AND MEASURING DEVICE FOR INTERFEROMETRIC MEASUREMENT OF AN OBJECT UNDER MEASUREMENT
METHOD FOR DETERMINING THE PATH OF A MEASUREMENT BEAM OF AN INTERFEROMETRIC MEASURING DEVICE, AND MEASURING DEVICE FOR INTERFEROMETRIC MEASUREMENT OF AN OBJECT UNDER MEASUREMENT
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机译:用于确定干涉测量测量装置的测量光束的路径的方法,以及测量下对象的干涉测量的测量装置
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摘要
A method for determining the path of a measurement beam of an interferometric measuring device, includes A. recording a plurality of spatially resolved images of the object under measurement; B. creating a three-dimensional model of the object under measurement; C. providing a beam-position image-recording unit and recording at least one spatially resolved beam-position-determining image; D. determining the spatial position and orientation of the beam-position image-recording unit relative to the object under measurement; E. providing a spatial relation between the spatial path of the measurement beam of the interferometric measuring device and the position and orientation of the beam-position image-recording unit; F. determining the spatial path of the measurement beam of the interferometric measuring device relative to the object under measurement. A measuring device for interferometric measurement of an object under measurement is also provided.
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