Method for determining the beam path of a measuring beam of an interferometric measuring device and measuring device for the interferometric measurement of a measurement object

摘要

The invention relates to a method for determining the beam path of a measuring beam of an interferometric measuring device, with the method steps: A. Taking a plurality of spatially resolved measurement object images, B. Creation of a three-dimensional target model; C. Providing a beam position image recording unit and recording at least one spatially resolved beam position determination image; D. Determining the spatial position and orientation of the beam position imaging unit relative to the measurement object; E. Providing a spatial relation between the spatial beam path of the measuring beam of the interferometric measuring device and the position and orientation of the beam position image acquisition unit; F. Determining the spatial beam path of the measuring beam of the interferometric measuring device relative to the measurement object. The invention further relates to a measuring device for interferometric measurement of a measurement object.