Piezoelectric tactile sensor and keyboard device using this piezoelectric tactile sensor

摘要

PROBLEM TO BE SOLVED: To provide a piezoelectric tactile sensor with which it is possible to suppress variation in an output voltage due to bending moment, and a keyboard device using this piezoelectric tactile sensor.;SOLUTION: A piezoelectric tactile sensor of one embodiment comprises a support, a diaphragm, a piezoelectric film, and two electrodes. The support includes an opening for pressure detection in a plane. The diaphragm is arranged on the plane of the support in a state of blocking the opening. The piezoelectric film is formed at a side of the diaphragm that is opposite the support. The two electrodes hold the piezoelectric substance therebetween. As the diaphragm bends, prescribed physical quantity is detected using a voltage outputted from the two electrodes. The piezoelectric film is arranged inside the opening in the support.;SELECTED DRAWING: Figure 2;COPYRIGHT: (C)2019,JPO&INPIT