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METHOD AND SYSTEM FOR DIFFUSING MAGNESIUM IN GALLIUM NITRIDE MATERIALS USING SPUTTERED MAGNESIUM SOURCES
METHOD AND SYSTEM FOR DIFFUSING MAGNESIUM IN GALLIUM NITRIDE MATERIALS USING SPUTTERED MAGNESIUM SOURCES
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机译:使用溅射镁源在氮化镓材料中漫射镁的方法和系统
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摘要
A method of forming a doped gallium nitride (GaN) layer includes providing a substrate structure, including a gallium nitride layer, forming a dopant source layer over the gallium nitride layer, and depositing a capping structure over the dopant source layer. The method also includes annealing the substrate structure to diffuse dopants into the gallium nitride layer, removing the capping structure and the dopant source layer, and activating the diffused dopants.
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