Suspension Design With Improved Microactuator Sensitivity And Microactuator Configurations

摘要

A piezoelectric (PZT) actuator assembly having a fixed-end and a hinged-end is provided. The assembly includes a first side electrode at the hinge-end, and a second side electrode at the fixed-end. The assembly includes a third piezoelectric layer including a top surface and a bottom surface disposed over the top surface of the second PZT layer. A fourth electrode is at least partially disposed on the top surface of the third PZT layer. The fourth electrode is connected to the second side electrode at the fixed-end.