AQUEOUS ALKALINE PRE-TREATMENT SOLUTION FOR USE PRIOR TO DEPOSITION OF A PALLADIUM ACTIVATION LAYER, METHOD AND USE THEREOF

摘要

The invention relates to an aqueous alkaline pre-treatment solution for use prior to deposition of a palladium activation layer on a substrate in manufacturing an article with an integrated circuit and a method and use thereof, wherein the solution comprises:- at least one hydroxycarboxylic acid or salt thereof according to the general formula (I)         [RCH2-(RCH)n-COO-]mMm+     (I)wherein n is integer from 2 to 4 and m is 1 or 2,R is independently H or OH with proviso that at least one R is OH, and whereinMm+with m: 1 is hydrogen, ammonium or alkali metal; or Mm+with m: 2 is earth alkali metal,- at least one polyoxyethylene sorbitan fatty acid ester derivative,- at least one sulphonated fatty acid or a salt thereof.