Aqueous alkaline pretreatment solution for use prior to deposition of palladium activation layer, method and use thereof

摘要

The present invention relates to an aqueous alkaline pretreatment solution and method and use thereof for use prior to deposition of a palladium activation layer on a substrate in the manufacture of articles having integrated circuits, said solution comprising: ) [RCH 2 -(RCH) n -COO - ] m M m+ at least one hydroxycarboxylic acid according to (I) or a salt thereof [wherein n is an integer from 2 to 4, m is 1 or 2, R is independently H or OH, with the proviso that at least one R is OH and M m+ with m:1 is hydrogen, ammonium or an alkali metal; or M m+ with m: 2 is an alkaline earth metal], - at least one polyoxyethylene sorbitan fatty acid ester, - at least one sulfonated fatty acid or a salt thereof.