Electronic component inspection equipment and electronic component inspection method

摘要

To provide a technique which enables detection of a defect in a rear face of an electronic component continuously generated due to a stage, preventing reduction in a yield of the electronic component.SOLUTION: An inspection device 100 comprises: a rear face image-capturing camera 4 which captures an image 9 of a rear face of an electronic component 1 transported from a stage 2; an image processing section 6 which extracts, from the image 9 of the rear face captured by the rear face image-capturing camera 4, for a plurality of electronic components 1, a defect 10 in the rear face of each of the electronic components 1; and a control section 7 which sets a virtual region 12 for an origin 11 of the defect 10 in the rear face of each of the electronic components 1 extracted by the image processing section 6 and determines quality of a surface of the stage 2 on the basis of the number of electronic components 1 including, in the virtual region 12, an origin 14 of a region 13 where a plurality of virtual regions 12 for the different electronic components 1 intersect.SELECTED DRAWING: Figure 1