Airborne Molecular Contamination Filter Cartridge System With Combustible Filter Cartridge and Reusable Frame

摘要

Filters for semiconductor tool and cleanroom applications are intended to control airborne molecular contamination. A filter cartridge system includes a filter cartridge having nonwoven fibers and at least one adsorbent. In some embodiments, the filter cartridge is constructed of substantially combustible materials to support end-of-service destruction of the filter cartridge.