AIRBORNE MOLECULAR CONTAMINATION FILTER CARTRIDGE SYSTEM WITH COMBUSTIBLE FILTER CARTRIDGE AND REUSABLE FRAME

摘要

Filters for semiconductor tool and clean room applications to control airborne molecular contamination. The filter cartridge system includes a filter cartridge having a non-woven fiber and at least one adsorbent. In some embodiments, the filter cartridge is constructed of substantially combustible materials to support its end of service destruction.