MEHTOD FOR ACQUIRING SURFACE CHRACTERISTIC OF MEASURING OBJECT USING TILTED TIP ATOMIC FORCE MICROSCOPE FOR CARRING OUT THE METHOD AND COMPUTER PROGRAM STORED ON STORAGE MEDIUM FOR CARRING OUT THE METHOD

摘要

The present invention relates to a method for obtaining the characteristics of the surface of a measurement object using an inclined tip, in which an image can be obtained deep to the inside of the undercut structure and the tip can easily escape from the inside of the undercut structure, this method is performed It relates to an atomic force microscope and a computer program stored in a storage medium for carrying out the method. A method according to an embodiment of the present invention for solving the above problems is a method of obtaining the characteristics of the surface of the measurement object by using a measurement device including a tip interacting with the surface of the measurement object. The method includes: a normal measurement step of obtaining a characteristic of the surface of the measurement object while relatively moving the tip in a first direction with respect to the surface of the measurement object using a first control method; During the normal measurement step, when at least one characteristic value obtained by the tip is determined to be an abnormal state out of a specific range, a second control method set based on a predefined shape of the surface of the measurement target is used. an escape step in which the tip is controlled to escape from the abnormal condition; and after the escaping step, the normal measuring step is performed again. includes