Physical quantity sensor module, clinometer, and structure monitoring device

摘要

A physical quantity sensor module includes: a resonant frequency shift based physical quantity sensor whose frequency adjusts with a adjust in physical quantity; a reference signal oscillator which outputs a reference signal; a frequency delta-sigma modulator which performs frequency delta-sigma modulation of the reference signal, using an operation signal based on a measurement target signal as an output from the resonant frequency shift based physical quantity sensor, and generates a frequency delta-sigma modulated signal; a first low-pass filter provided on an output side of the frequency delta-sigma modulator and operating synchronously with the measurement target signal as the output from the resonant frequency shift based physical quantity sensor; and a second low-pass filter provided on an output side of the first low-pass filter and operating synchronously with the reference signal.