Pattern edge detection method, pattern edge detecting device, and recording medium in which a program for executing the pattern edge detection on the computer is recorded

摘要

Problem to be solved: to provide a pattern edge detection method capable of detecting an edge (contour) of a pattern on an image without using the design data of the pattern.Pattern edge detection methodThe target image of the target pattern formed on the work piece is generated.Generates a feature vector representing multiple features of each pixel of the target imageFeatures vectorEnter a model built by machine learningIs the pixel with a feature vector an edge pixelOutput the result of the decision from the modelA virtual edge is generated by connecting a plurality of pixels having a feature vector obtained by the determination result indicating an edge pixel.Diagram