Y2O3-ZrO2 EROSION RESISTANT MATERIAL FOR CHAMBER COMPONENTS IN PLASMA ENVIRONMENTS

摘要

A method of manufacturing a chamber component for a processing chamber comprises forming a green body using a Y₂O₃—ZrO₂ powder consisting essentially of 55-65 mol % Y₂O₃ and 35-45 mol % ZrO₂, and sintering the green body to produce a sintered ceramic body consisting essentially of one or more phase of Y₂O₃—ZrO₂, the sintered ceramic body consisting essentially of 55-65 mol % Y₂O₃ and 35-45 mol % ZrO₂.