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METHOD FOR PRODUCING AN ATOM TRAP, AND ATOM TRAP
METHOD FOR PRODUCING AN ATOM TRAP, AND ATOM TRAP
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机译:制造原子陷阱的方法和原子陷阱
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摘要
A method for producing an atom trap (20) comprising the steps: (a) applying an electrically conductive starting layer (2) onto a substrate (1), (b) applying at least one electric conductor element (4) to the starting layer (2) by means of electro-chemical deposition and/or a lift-off method, (c) applying at least one contacting element (6) by means of electro-chemical deposition and/or a lift-off method, such that the at least one contacting element (6) is connected to the at least one electric conductor element (4) in an electrically conductive manner, (d) removing the starting layer (2) in regions in which no electric conductor element (4) has been applied, (e) applying an insulation layer (7) that at least partially covers the at least one electric conductor element (4) and the at least one contacting element (6), (f) planarizing the insulation layer (7) and exposing the at least one contacting element (6), and (g) applying at least one additional electric conductor (14) element by means of electro-chemical deposition and/or a lift-off method, such that the at least one additional electric conductor element (14) is connected to the at least one contacting element (6) in an electrically conductive manner.
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