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METHOD FOR PRODUCING AN ATOM TRAP, AND ATOM TRAP

机译:制造原子陷阱的方法和原子陷阱

摘要

A method for producing an atom trap (20) comprising the steps: (a) applying an electrically conductive starting layer (2) onto a substrate (1), (b) applying at least one electric conductor element (4) to the starting layer (2) by means of electro-chemical deposition and/or a lift-off method, (c) applying at least one contacting element (6) by means of electro-chemical deposition and/or a lift-off method, such that the at least one contacting element (6) is connected to the at least one electric conductor element (4) in an electrically conductive manner, (d) removing the starting layer (2) in regions in which no electric conductor element (4) has been applied, (e) applying an insulation layer (7) that at least partially covers the at least one electric conductor element (4) and the at least one contacting element (6), (f) planarizing the insulation layer (7) and exposing the at least one contacting element (6), and (g) applying at least one additional electric conductor (14) element by means of electro-chemical deposition and/or a lift-off method, such that the at least one additional electric conductor element (14) is connected to the at least one contacting element (6) in an electrically conductive manner.
机译:一种制造原子阱( 20 )的方法,其包括步骤:(a)将导电起始层( 2 )施加到基材上( 1 ),(b)通过电化学沉积和/或升降装置将至少一个电导体元件( 4 )施加到起始层( 2)) -off方法,(c)通过电化学沉积和/或剥离方法施加至少一个接触元件( 6 ),使得至少一个接触元件( 6 )以导电方式连接到至少一个电导体元件( 4 ),(d)除去起始层( 2 )在没有施加电导体元件( 4 )和至少一个接触元件( 6 ),(f)平坦化绝缘层( 7 )并曝光AT至少有一个co.通过电化学沉积和/或剥离方法将至少一个附加电导体( 14 / b>)元件施加至少一种附加电导体( 14 / b>)元件的Ntacting元件(g) ,使得至少一个附加的电导体元件( 14 )以导电方式连接到至少一个接触元件( 6 )。

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