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Methods and apparatus for drying marangoni

机译:用于干燥Marangoni的方法和设备

摘要

an adjustable spray bar assembly having mounting brackets coupled to a support structure of the drying system, a base assembly coupled to the mounting brackets and disposed parallel to a face of the support structure, and a mounting assembly coupled to and parallel to the base assembly A method and apparatus for drying Marangoni substrates are disclosed. The mounting assembly is vertically adjustable at two distal ends. The mounting assembly includes arms on which one or more spray bars may be disposed. The one or more spray bars are secured to the mounting assembly, but can be rotated about a longitudinal axis.
机译:可调节的喷嘴组件,其具有连接到干燥系统的支撑结构的安装支架,基座组件连接到安装支架并平行于支撑结构的面部设置,以及连接到基座组件的安装组件和平行于基座组件a公开了用于干燥Marangoni基板的方法和装置。安装组件在两个远端垂直调节。安装组件包括可以设置一个或多个喷嘴的臂。一个或多个喷嘴固定到安装组件上,但是可以围绕纵向轴线旋转。

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