Solid evaporation system of metal halide compound for thin film formation.

摘要

PROBLEM TO BE SOLVED: To provide a system for solidifying, evaporating and supplying a metal halogen compound for thin film deposition, capable of reducing particle contamination.;SOLUTION: The system for solidifying, evaporating and supplying a metal halogen compound for thin film deposition comprises an evaporation raw material vessel 100 for storing and evaporating the metal halogen compound for thin film deposition and a buffer tank 101 connected to the evaporation raw material vessel 100. The evaporation raw material vessel 100 includes a vessel main body having a vessel wall, a lid body, a fastening member and a joint member; the vessel wall has a double wall structure constituted of an inner wall member and an outer wall member and is constituted so as to introduce a carrier gas into the vessel main body through between the double wall structure. The vessel wall is constituted of copper having a purity of 99-99.9999%, aluminum having a purity of 99-99.9996% or titanium having a purity of 99-99.9999%, and each of the vessel main body, the lid body, the fastening member and the joint member is subjected to fluororesin coating and/or electrolytic polishing.;SELECTED DRAWING: Figure 1;COPYRIGHT: (C)2020,JPO&INPIT