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Charged particle detector including a light-emitting section having lamination structure, charged particle beam device, and mass spectrometer
Charged particle detector including a light-emitting section having lamination structure, charged particle beam device, and mass spectrometer
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机译:带电粒子检测器,包括具有层压结构,带电粒子束装置和质谱仪的发光部分
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摘要
The objective of the present invention is to provide a charged particle detector and a charged particle beam device with which it is possible to acquire a high luminous output while rapidly eliminating charged particles that are incident to a scintillator. In order to achieve said objective the present invention proposes: a charged particle detector provided with a light-emitting unit including a laminated structure obtained by laminating a GaInN-containing layer and a GaN layer, and provided with a conductive layer that is in contact with the GaInN-containing layer on the charged particle incidence surface side of the laminated structure; and a charged particle beam device.
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