NANOSECOND PULSER RF ISOLATION FOR PLASMA SYSTEMS

摘要

Embodiments of the invention include a plasma system. The plasma system includes a plasma chamber; an RE driver configured to drive bursts into the plasma chamber with an RE frequency; a nanosecond pulser configured to drive pulses into the plasma chamber with a pulse repetition frequency, the pulse repetition frequency being less than the RE frequency; a high pass filter disposed between the RE driver and the plasma chamber; and a low pass filter disposed between the nanosecond pulser and the plasma chamber.