ANGLE RESOLVED SPECTRAL REFLECTOMETRY USING SPATIAL LIGHT MODULATOR

摘要

An angle-resolved spectroreflectometer for measuring a physical quantity of a sample, wherein the angle-resolved spectroreflectometer modulates a beam-cross-section of light with respect to light received from a light source into a shape of a predetermined first image spatial light modulator (SLM); an objective lens that receives the modulated light and makes it incident on the sample, and receives and passes the light reflected from the sample; a spectrometer that receives the light passing through the objective lens and measures the intensity of the reflected light according to the wavelength as an electrical signal; includes