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Interferometric Elements, Spectrometers and How Interferometers Work
Interferometric Elements, Spectrometers and How Interferometers Work
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机译:干涉元件,光谱仪和干涉仪如何工作
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摘要
The present invention relates to an interferometric element (125) for use in a spectrometer (100), said interferometric element (125) being disposed in series in the optical path (120) of the interferometric element (125) at least one first mirror a micromechanical Fabry-Perot filter element (FPI1, FPI2) having an element (135), a second mirror element (140) and a third mirror element (145), the first mirror element (135) and the second The first distance 160 between the mirror elements 140 and/or the second distance 165 between the second mirror element 140 and the third mirror element 145 can be varied.
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