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Interferometric Elements, Spectrometers and How Interferometers Work

机译:干涉元件,光谱仪和干涉仪如何工作

摘要

The present invention relates to an interferometric element (125) for use in a spectrometer (100), said interferometric element (125) being disposed in series in the optical path (120) of the interferometric element (125) at least one first mirror a micromechanical Fabry-Perot filter element (FPI1, FPI2) having an element (135), a second mirror element (140) and a third mirror element (145), the first mirror element (135) and the second The first distance 160 between the mirror elements 140 and/or the second distance 165 between the second mirror element 140 and the third mirror element 145 can be varied.
机译:本发明涉及一种用于光谱仪(100)的干涉式元件(125),所述干涉元件(125)串联设置在干涉元件(125)的光路(120)中,至少一个第一镜A具有元件(135),第二镜子元件(140)和第三镜子元件(145),第一镜元件(135),第一镜元件(135)和第二距离160之间的微机械法布里 - 珀罗滤波器元件(FPI1,FPI2),第一镜元件(135)和第二距离160可以改变第二镜子元件140和第三镜子元件145之间的镜子元件140和/或第二距离165。

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