Relationship specifying method, relation specific device, relation specific program, correction method, correction device, and correction program

摘要

PROBLEM TO BE SOLVED: To allow an interference waveform to be corrected.;SOLUTION: A computer 2 obtains interference waveforms corresponding to respective inclination angles in the case of changing an inclination angle, i.e. an angle of a work W placed on a three-dimensional measuring device 1 to an optical path of white light radiated by a white interferometer 12 at the three-dimensional measuring device 1 including the white interferometer 12, identifies a plurality of phase offsets between each of the plurality of interference waveforms obtained at the plurality of inclination angles and a reference interference waveform, and identifies relation between the inclination angle and the phase offset on the basis of the inclination angles and the phase offsets.;SELECTED DRAWING: Figure 5;COPYRIGHT: (C)2019,JPO&INPIT