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RELATION IDENTIFYING METHOD, RELATION IDENTIFYING DEVICE, RELATION IDENTIFYING PROGRAM, CORRECTION METHOD, CORRECTION DEVICE, AND CORRECTION PROGRAM
RELATION IDENTIFYING METHOD, RELATION IDENTIFYING DEVICE, RELATION IDENTIFYING PROGRAM, CORRECTION METHOD, CORRECTION DEVICE, AND CORRECTION PROGRAM
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机译:关系标识方法,关系标识设备,关系标识程序,校正方法,校正设备和校正程序
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摘要
PROBLEM TO BE SOLVED: To allow an interference waveform to be corrected.;SOLUTION: A computer 2 obtains interference waveforms corresponding to respective inclination angles in the case of changing an inclination angle, i.e. an angle of a work W placed on a three-dimensional measuring device 1 to an optical path of white light radiated by a white interferometer 12 at the three-dimensional measuring device 1 including the white interferometer 12, identifies a plurality of phase offsets between each of the plurality of interference waveforms obtained at the plurality of inclination angles and a reference interference waveform, and identifies relation between the inclination angle and the phase offset on the basis of the inclination angles and the phase offsets.;SELECTED DRAWING: Figure 5;COPYRIGHT: (C)2019,JPO&INPIT
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