Galvano scanner and laser machining system

摘要

A galvano scanner that irradiates an object with a laser beam to perform machining, the galvano scanner comprising: an emission unit that emits the laser beam; a protective glass that protects the emission unit from a scattered matter generated in machining; and a glass holding mechanism that holds the protective glass, the protective glass at least including a triple structure in a vertical direction, the glass holding mechanism holding the protective glass that is the lowermost layer in the protective glass having the triple structure so that the protective glass that is the lowermost layer can be fallen off downward.