首页>
外国专利>
PIEZOELECTRIC ELEMENT, ULTRASONIC SENSOR, LIQUID DISCHARGING HEAD, AND METHOD OF MANUFACTURING PIEZOELECTRIC ELEMENT
PIEZOELECTRIC ELEMENT, ULTRASONIC SENSOR, LIQUID DISCHARGING HEAD, AND METHOD OF MANUFACTURING PIEZOELECTRIC ELEMENT
展开▼
机译:压电元件,超声波传感器,液体排放头和制造压电元件的方法
展开▼
页面导航
摘要
著录项
相似文献
摘要
A supporting film (52) is provided on an opening (51A) and a wall portion (51B) of a substrate (51), a piezoelectric film (54) is provided on a first region (521) of the supporting film (52) corresponding to the opening (51A) and a second region (522) of the supporting film (52) corresponding to the wall portion (51B), and the thickness (t2) of the piezoelectric film (54) provided on the second region (522) of the supporting film (52) is smaller than the thickness (t1) of the piezoelectric film (54) provided on the first region (521) of the supporting film (52). Therefore, vibration in the region (541) of the piezoelectric film (54) that is provided for vibration is large, and vibration in the region (542) of the piezoelectric film (54) that is not provided for vibration is small, which leads to alleviation of the disadvantage such as loss of vibration characteristics of a piezoelectric element (5).
展开▼