A system for determining important parameters using a high-dimensional variable selection model

摘要

To provide a technology for making it possible to quickly navigate a large number of tool parameters and identify some most critical parameters that can influence tool performance.SOLUTION: A high-dimensional variable selection unit 102 determines a list of critical parameters from sensor data and parametric tool measurements from a semiconductor manufacturing tool 104, such as a semiconductor inspection tool or other types of semiconductor manufacturing tools. The list of critical parameters may be used to design a next generation semiconductor manufacturing tool, to bring the semiconductor manufacturing tool back to a normal status, to match the semiconductor manufacturing tool's results with that of another semiconductor manufacturing tool, or to develop a specification for the semiconductor manufacturing tool.SELECTED DRAWING: Figure 1