Thermophysical property value measuring device and thermophysical characteristic value measuring method

摘要

In the thermophysical characteristic value measuring device (1), a light-shielding body (11) that shields light from light except for an opening is provided so as to face the surface of the sample thin film of the sample (10). The heating light of the repeating pulse output from the heating laser (22) is applied to the sample thin film via the light-shielding body (11). The continuous temperature measurement light output from the temperature measurement laser (23) is irradiated to a measurement position separated from the heating light irradiation position on the sample thin film by a predetermined distance. The photodetector (26) detects the reflected light of the temperature-measured light on the sample thin film, and the computer (28) acquires the thermoreflectance signal digitally converted by the AD converter (27). The computer (28) calculates the thermophysical property value in the creepage direction of the sample thin film of the sample (10) based on the acquired thermoreflectance signal.