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INTERFEROMETER MOVABLE MIRROR POSITION MEASUREMENT APPARATUS AND FOURIER TRANSFORM INFRARED SPECTROSCOPY
INTERFEROMETER MOVABLE MIRROR POSITION MEASUREMENT APPARATUS AND FOURIER TRANSFORM INFRARED SPECTROSCOPY
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机译:干涉仪可移动镜子位置测量装置和傅立叶变换红外光谱
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摘要
An interferometer movable mirror position measurement apparatus for determining a position of a movable mirror of an interferometer. The interferometer movable mirror position measurement apparatus including: a laser light source; a phase separation optical system configured to make first light and second light separately detected; a signal conversion unit configured to detect the first light and the second light in synchronization with a position of a movable mirror to generate a first sinusoidal wave signal and a second sinusoidal wave signal, respectively; a phase calculation unit configured to perform normalization and phase difference correction on each of the first sinusoidal wave signal and the second sinusoidal wave signal, and then calculate a phase of the first sinusoidal wave signal or the second sinusoidal wave signal at each time point; and a movable mirror position determination unit configured to determine a position of the movable mirror at a predetermined time point.
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