SYSTEM FOR AUTOMATICALLY MEASURING AND ANALYZING REDUCTION EFFICIENCY OF SEMICONDUCTOR AND DISPLAY PROCESS EMISSION GREENHOUSE GAS REDUCTION FACILITIES

摘要

The present invention relates to a system for automatically measuring and analyzing reduction efficiency of semiconductor and display process emission greenhouse gas reduction facilities and, more specifically, to a system for automatically measuring and analyzing reduction efficiency of semiconductor and display process emission greenhouse gas reduction facilities, the system being capable of automatically performing calibration and measurement methods according to guidelines (National Institute of Environmental Research) for a reduction efficiency measurement method of a greenhouse gas reduction facility used in the semiconductor and display industry as defined in a method for calculating greenhouse gas emissions in semiconductor and display processes (Korean Industrial Standard KS H NEW2017).