首页> 外国专利> REPORTING DEVICE WITH A MANY OPTICAL ELEMENTS AND A MODULAR ELECTROMAGNETIC RADIATION SOURCE CONTAINING A RADIATION SOURCE MODULE WITH A HALF-VALUE DIFFERENCE

REPORTING DEVICE WITH A MANY OPTICAL ELEMENTS AND A MODULAR ELECTROMAGNETIC RADIATION SOURCE CONTAINING A RADIATION SOURCE MODULE WITH A HALF-VALUE DIFFERENCE

机译:具有许多光学元件的报告装置和包含具有半值差异的辐射源模块的模块化电磁辐射源

摘要

The invention concerns an exposure device containing:(a) a modular electromagnetic radiation source, designed and trained to emit electromagnetic radiation; and(b) a variety of optical elements; where the modular electromagnetic radiation source and the multitude of optical elements are designed and trained to illuminate a flat surface with electromagnetic radiation; where the flat surface of the radiation extends in a longitudinal and transverse direction; where the longitudinal direction is perpendicular to the plane of the irradiation surface; where the multitude of optical elements is arranged and trained,to produce a variety of different intensity distributions along the longitudinal direction of varying intensities of electromagnetic radiation on the flat surface for a surface illumination; where the modular electromagnetic source contains at least one radiation source module; with at least one radiation source moduleYeah. is designed and trained to emit at least part of the electromagnetic radiation over an emitter surface; andb. has a half-value angle of less than 90's, spanned in the irradiation life, determined at a distance of 28 mm from the emitter surface.Furthermore, the invention concerns an exposure device; a procedure with a lighting; and the use of the exposure device and a radiation source module.
机译:本发明涉及一种曝光装置,其包含:(a)模块化电磁辐射源,设计和培训以发射电磁辐射;和(b)各种光学元件;在设计和培训具有电磁辐射的平坦表面的模块化电磁辐射源和众多光学元件的位置;在辐射的平坦表面沿纵向和横向延伸;纵向垂直于照射表面的平面;在布置和培训和培训的众多光学元件的情况下,沿着用于表面照明的平坦表面上的电磁辐射的变化强度的纵向产生各种不同的强度分布;模块化电磁源至少包含一个辐射源模块;具有至少一个辐射源模块是的。设计和培训,以发射发射极表面的至少一部分电磁辐射;和湾在照射寿命中跨越90°的半值角度,从发射极表面距离28mm的距离。此外,本发明涉及一种曝光装置;带照明的程序;并使用曝光装置和辐射源模块。

著录项

  • 公开/公告号DE102019219511A1

    专利类型

  • 公开/公告日2021-06-17

    原文格式PDF

  • 申请/专利权人 HERAEUS NOBLELIGHT GMBH;

    申请/专利号DE201910219511

  • 发明设计人 MARKO HOFMANN;MICHAEL PEIL;OLIVER WEISS;

    申请日2019-12-12

  • 分类号G21K5;G02B27/18;

  • 国家 DE

  • 入库时间 2024-06-14 21:41:14

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